ИЗСЛЕДВАНЕ ЕФЕКТА ОТ НЕРАВНОВЕСЕН ПРОЦЕС ВЪРХУ ТРИБОЛОГИЧНИТЕ СВОЙСТВА НА ЧИСТИ И ЛЕГИРАНИ ta-C ПОКРИТИЯ ПРИ ПРИЛАГАНЕ НА ИМПУЛСНО-ДЪГОВО КАТОДНО РАЗПРАШАВАНЕ
A STUDY OF PULSED ARC NON-EQUILIBRIUM PROCESS EFFECT ON TRIBOLOGICAL PROPERTIES OF PURE AND DOPED ta-C COATINGS

Author(s): Ivaylo S. Dolchinkov
Subject(s): Essay|Book Review |Scientific Life, Scientific Life
Published by: Бургаски свободен университет
Keywords: Tetrahedral amorphous Carbon, ta-C; Pulsed arc deposition; Doped ta-C
Summary/Abstract: Hydrogen-free tetrahedral bonded amorphous Carbon films (ta-C), W doped, and B doped ta-C were deposited by a special pulsed arc technique based on a non-equilibrium process. Their structure is mainly determined by the energy of the impinging the substrate Carbon ions and the following relaxation effect linked with the temperature of the coating during deposition. In addition, the implantation depth is heavily influenced by the angle of incidence of the ions. Furthermore, the deposition rate was checked for various pulse architectures, and for Boron (B) and Tungsten (W) doped C targets. There is a clear effect that a deposition rate above a certain threshold value negatively influences the hardness.

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